Einen verständlichen Zugang zum Thema bietet dieser Band und wendet sich an Praktiker ebenso wie an Studierende und Wissenschaftler. Er macht u. a. vertraut mit elektrochemischen Methoden und der Anwendung von Materialien, die zur Herstellung von porösem Silizium notwendig sind.

InhaltsangabePreface FUNDAMENTALS OF POROUS SILICON PREPARATION Introduction Chemical Reactions Governing the Dissolution of Silicon Experimental Set-up and Terminology for Electrochemical Etching of Porous Silicon Electrochemical Reactions in the Silicon System Density, Porosity, and Pore Size Definitions Mechanisms of Electrochemical Dissolution and Pore Formation Resume of the Properties of Crystalline Silicon Choosing, Characterizing, and Preparing a Silicon Wafer PREPARATION OF MICRO-, MESO-, AND MACRO-POROUS SILICON LAYERS Etch Cell: Materials and Construction Power Supply Other Supplies Safety Precautions and Handling of Waste Preparing HF Electrolyte Solutions Cleaning Wafers Prior to Etching Preparation of Microporous Silicon from a p-Type Wafer Preparation of Mesoporous Silicon from a p++-Type Wafer Preparation of Macroporous, Luminescent Porous Silicon from an n-Type Wafer (Frontside Illumination) Preparation of Macroporous, Luminescent Porous Silicon from an n-Type Wafer (Back Side Illumination) Preparation of Porous Silicon by Stain Etching Preparation of Silicon Nanowire Arrays by Metal-Assisted Etching PREPARATION OF SPATIALLY MODULATED POROUS SILICON LAYERS TimeProgrammable Current Source Pore Modulation in the z-Direction: Double Layer Pore Modulation in the z-Direction: Rugate Filter More Complicated Photonic Devices: Bragg Stacks, Microcavities, and Multi-Line Spectral Filters Lateral Pore Gradients (in the x-y Plane) Patterning in the x-y Plane Using Physical or Virtual Masks Other Patterning Methods FREESTANDING POROUS SILICON FILMS AND PARTICLES Freestanding Films of Porous Silicon-"Lift-offs" MicronScale Particles of Porous Silicon by Ultrasonication of Liftoff Films CoreShell (Si/SiO2) Nanoparticles of Luminescent Porous Silicon by Ultrasonication CHARACTERIZATION OF POROUS SILICON Gravimetric Determination of Porosity and Thickness Electron Microscopy and Scanned Probe Imaging Methods Optical Reflectance Measurements Porosity, Pore Size, and Pore Size Distribution by Nitrogen Adsorption Analysis (BET, BJH, and BdB Methods) Measurement of Steady-State Photoluminescence Spectra TimeResolved Photoluminescence Spectra Infrared Spectroscopy of Porous Silicon CHEMISTRY OF POROUS SILICON OxideForming Reactions of Porous Silicon Biological Implications of the Aqueous Chemistry of Porous Silicon Formation of Silicon-Carbon Bonds Thermal Carbonization Reactions Conjugation of Biomolecules to Modified Porous Silicon Chemical Modification in Tandem with Etching Metallization Reactions of Porous Silicon APPENDIX A1. ETCH CELL ENGINEERING DIAGRAMS AND SCHEMATICS Standard or Small Etch Cell-Complete Standard Etch Cell Top Piece Small Etch Cell Top Piece Etch Cell Base (for Either Standard or Small Etch Cell) Large Etch Cell-Complete Large Etch Cell Top Piece Large Etch Cell Base APPENDIX A2. SAFETY PRECAUTIONS WHEN WORKING WITH HYDROFLUORIC ACID Hydrofluoric Acid Hazards First Aid Measures for HF Contact Note to Physician HF Antidote Gel APPENDIX A3. GAS DOSING CELL ENGINEERING DIAGRAMS AND SCHEMATICS Gas Dosing Cell Top Piece Gas Dosing Cell Middle Piece Gas Dosing Cell Bottom Piece

Leseprobe

Preface FUNDAMENTALS OF POROUS SILICON PREPARATION Introduction Chemical Reactions Governing the Dissolution of Silicon Experimental Set-up and Terminology for Electrochemical Etching of Porous Silicon Electrochemical Reactions in the Silicon System Density, Porosity, and Pore Size Definitions Mechanisms of Electrochemical Dissolution and Pore Formation Resume of the Properties of Crystalline Silicon Choosing, Characterizing, and Preparing a Silicon Wafer PREPARATION OF MICRO-, MESO-, AND MACRO-POROUS SILICON LAYERS Etch Cell: Materials and Construction Power Supply Other Supplies Safety Precautions and Handling of Waste Preparing HF Electrolyte Solutions Cleaning Wafers Prior to Etching Preparation of Microporous Silicon from a p-Type Wafer Preparation of Mesoporous Silicon from a p++-Type Wafer Preparation of Macroporous, Luminescent Porous Silicon from an n-Type Wafer (Frontside Illumination) Preparation of Macroporous, Luminescent Porous Silicon from an n-Type Wafer (Back Side Illumination) Preparation of Porous Silicon by Stain Etching Preparation of Silicon Nanowire Arrays by Metal-Assisted Etching PREPARATION OF SPATIALLY MODULATED POROUS SILICON LAYERS Time-Programmable Current Source Pore Modulation in the z-Direction: Double Layer Pore Modulation in the z-Direction: Rugate Filter More Complicated Photonic Devices: Bragg Stacks, Microcavities, and Multi-Line Spectral Filters Lateral Pore Gradients (in the x-y Plane) Patterning in the x-y Plane Using Physical or Virtual Masks Other Patterning Methods FREESTANDING POROUS SILICON FILMS AND PARTICLES Freestanding Films of Porous Silicon-"Lift-offs" Micron-Scale Particles of Porous Silicon by Ultrasonication of Lift-off Films Core-Shell (Si/SiO2) Nanoparticles of Luminescent Porous Silicon by Ultrasonication CHARACTERIZATION OF POROUS SILICON Gravimetric Determination of Porosity and Thickness Electron Microscopy and Scanned Probe Imaging Methods Optical Reflectance Measurements Porosity, Pore Size, and Pore Size Distribution by Nitrogen Adsorption Analysis (BET, BJH, and BdB Methods) Measurement of Steady-State Photoluminescence Spectra Time-Resolved Photoluminescence Spectra Infrared Spectroscopy of Porous Silicon CHEMISTRY OF POROUS SILICON Oxide-Forming Reactions of Porous Silicon Biological Implications of the Aqueous Chemistry of Porous Silicon Formation of Silicon-Carbon Bonds Thermal Carbonization Reactions Conjugation of Biomolecules to Modified Porous Silicon Chemical Modification in Tandem with Etching Metallization Reactions of Porous Silicon APPENDIX A1. ETCH CELL ENGINEERING DIAGRAMS AND SCHEMATICS Standard or Small Etch Cell-Complete Standard Etch Cell Top Piece Small Etch Cell Top Piece Etch Cell Base (for Either Standard or Small Etch Cell) Large Etch Cell-Complete Large Etch Cell Top Piece Large Etch Cell Base APPENDIX A2. SAFETY PRECAUTIONS WHEN WORKING WITH HYDROFLUORIC ACID Hydrofluoric Acid Hazards First Aid Measures for HF Contact Note to Physician HF Antidote Gel APPENDIX A3. GAS DOSING CELL ENGINEERING DIAGRAMS AND SCHEMATICS Gas Dosing Cell Top Piece Gas Dosing Cell Middle Piece Gas Dosing Cell Bottom Piece